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|   | Features: Slim platrorm with rigid structure is adopted. One piece unit with motor control connection; Module structures, which are right angle lonear bearing, roller linear bearing and ball screw, are installed between base plate and platform corners. Features listed below: 
 - Fit to large workpiece By combination of many sets, large size of workpiece is also available. 
 - Super slim、light weight and stable XYθ mechanism adopted, mechanism can be light and stable. 
 - Hollow structure There is more space at oenter of platform and base where optical device can be installed. 
 
	- Load unit Patented Load unit is adopted at center to take load, which realizes heavy load with tiny mechanism. 
 - High rigidity、High precision Preloaded Crossed type roller Bearing and high precise ball screw sustain high precision and high rigidity of mechanism. | 
| Mechanical type | 
| Product No | Table Size(mm) | Stroke(mm) | Dynamic Load(kgf) | Static Load(kgf) | Repeated Stability(μm) | Parallel Precision(μm) | Ball screw pitch(mm) | Mass(kg) | Material | Surface treatment | 
| TKX-100S-C1 | 100 × 100 | ±2 × ±2 × 2° | 1.5 | 5 | ± 1 | 30 | 1 | 2.5 | AISI 1045 | Black Cr plating | 
| TKX-100S-C5 | 100 × 100 | ±2 × ±2 × 2° | 1.5 | 5 | ± 5 | 30 | 1 | 2.5 | AISI 1045 | Black Cr plating | 

| Device type | 
| Motor Type | Angle / Step ( ° ) | Rated Voltage( V ) | Rated Current( A ) | Holding Torque( kgf.cm ) | Sensor Voltage( V ) | 
| 20H30L-0.5 | 1.8 | 5 | 0.5 | 0.18 | 24 | 
| Dirver type | Resolution( PPS/REV ) | Current( A ) | Input Voltage( DC V ) | 
	Response Frequency | Connector | 
| DA-2D33B | 51200 | 0.4 ~ 3.2 | 24 ~ 36 | 1000 | 12 pin metal male connector |